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Hierarchical attention-based graph deep reinforcement learning for scheduling single-armed cluster tools with multiple types of wafers

Sep 2026 · International Journal of Machine Learning and Cybernetics · Vol 17 · 0 citations · 36 references
Scheduling and Optimization Algorithms

TL;DR

The State Extraction Graph (SEG) is proposed, which provides a significantly more concise structural representation than Petri nets for modeling multi-wafer fabrication processes and a Graph Deep Reinforcement Learning (G-DRL) method for scheduling cluster tools.

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