#reinforcement learning
Sep 2026
Hierarchical attention-based graph deep reinforcement learning for scheduling single-armed cluster tools with multiple types of wafers
The State Extraction Graph (SEG) is proposed, which provides a significantly more concise structural representation than Petri nets for modeling multi-wafer fabrication processes and a Graph Deep Reinforcement Learning (G-DRL) method for scheduling cluster tools.
Bi-Feng Zhu, Bin Li, Jing-Hui Zhong
· International Journal of Mac... · 0 citations