Performance Analysis and Design of an Optomechanical Microphone Using an Integrated Photonic Waveguide Interferometer

Abstract

We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strain in the sensing waveguide and changing its optical path length. We analytically evaluate the optical and mechanical transduction mechanisms and key figures of merit, including signal-to-noise ratio, dynamic range, acoustic overload pressure, and minimum detectable pressure. Two design cases are considered: a MEMS microphone and a measurement microphone. The results indicate competitive performance but no substantial overall advantage over state-of-the-art microphones in conventional applications. The architecture may nevertheless offer advantages for high-temperature and other harsh-environment sensing applications.