Author

Zi-Huan Liu

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Preprint Sep 2026

Performance Analysis and Design of an Optomechanical Microphone Using an Integrated Photonic Waveguide Interferometer

We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strain in the sensing waveguide and changing its optical path length. We analytically evaluate the optical and mechanical transduction mechanisms...

X. Niu, Yu-Qi Meng, Zi-Huan Liu et al. · 0 citations

Preprint Oct 2026

Modeling and Design of a Diaphragm-Integrated Photonic Waveguide Microphone

Can an integrated optical readout improve the useful operating range of a miniature microphone? We address this question with an analytical model of a diaphragm carrying the sensing arm of a Mach-Zehnder interferometer (MZI). The model links pressure-induced bending to waveguide elongation and then to photocurrent, all...

X. Niu, Yu-Qi Meng, Zi-Huan Liu et al. · 0 citations