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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

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Wen-Xiu Dong

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Review Open access Sep 2026

Thickness Engineering in HfO2-Based Ferroelectrics: A Critical Review of Phase, Switching, Reliability, and Device Trade-Offs

HfO2-based ferroelectrics have extended a familiar CMOS high-κ dielectric into a materials platform for nonvolatile memory, low-power logic, and in-memory hardware. This review examines thickness engineering in hafnia, especially Hf0.5Zr0.5O2 (HZO), through the state produced during fabrication, the voltage and time av...

Yu-Wei Cai, Yao Li, Zhong-Jian Gao et al. · 0 citations

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