Sep 2026
A large-travel hybrid metrology platform integrating laser focus sensor and atomic force microscopy
Abstract Modern micro- and nanoscale manufacturing requires traceable multi-scale metrology spanning macroscopic geometries and sub-micrometer features. Singlesensor systems are limited by trade-offs between resolution, speed, and measurement range. This work presents a hybrid platform integrating an optical microscope...
D. A. Brasil, M. Katzschmann, S. Hesse et al.
· TM. Technisches Messen · 0 citations