Monolithic 3D integration of atomic-layer-deposited oxide semiconductors on 200-mm silicon wafers.
Chang Niu
Lin-Jia Long
Lu-Qi Zheng
Shu-Ting Du
Jian-Yu Lin
Kisoo Nam
Ze-Hao Lin
Chang Liu
Juan-Juan Lu
Hai-Yan Wang
Hai-Tong Li
Pei-De D. Ye
Medicine