Nov 2026· IEEE Photonics Technology Letters· Vol 38, pp. 1833-1836· 0 citations· 21 references
Abstract
Compact and high-precision displacement sensing is a prerequisite for next-generation photolithography and nanomanufacturing. While metasurface-based sensors offer miniaturization, existing solutions inevitably resort to external optical systems of prisms or bulky lens for beam manipulation, hindering full integration of compact devices. Here, we propose a scheme of all-metasurface interferometry with ultrahigh sensitivity displacement sensing within a microscopic footprint. A Pancharatnam–Berry (PB) phase gradient metasurface initially encodes transverse displacement into a spin-dependent phase shift via large-angle diffraction (12°), while a polarization-multiplexed bifocal metalens subsequently recombines the beams to perform the differential phase-to-intensity conversion. Numerical results indicate a theoretical displacement resolution approaching 50 pm under ideal conditions with intrinsic common-mode noise suppression, achieved without any bulk optical components. This work presents a robust strategy for on-chip metrology, bridging the gap between picometer-level precision and integrated photonics.
Chip-scale optically pumped magnetometers (OPMs) hold great potential for high-resolution biomagnetic imaging, but their further miniaturization is constrained by the bulky macroscopic optical components conventionally used for polarization detection. However, existing nanophotonic devices designed to replace these bul...
Gao-Pu Hou, Jin-Sheng Hu, Lu Liu et al.· International Conference on...· 0 citations
Metasurfaces offer a compact platform for subwavelength control of multidimensional optical fields, making them promising for high-fidelity vectorial light-field reconstruction. Existing approaches typically address this requirement by introducing additional degrees of freedom, either through nanostructures of varying...
Shu-Rui Zhang, Kai Pan, Qing-Ming Zhou et al.· Optics Letters· 0 citations
The relentless pursuit of higher information density and processing speed has driven photonic chips toward miniaturization, high performance, and multifunctional integration. Metasurfaces, composed of subwavelength artificial meta-atoms, have emerged as a revolutionary platform for manipulating light fields at the nano...
Yi-Lan Pang, Jia-Qi Cao, Si-Tong Lin et al.· Photonics· 0 citations
Optically pumped magnetometers (OPMs) have shown great potential for biomagnetic measurements due to high sensitivity and non-invasive operation. On-chip integration has emerged as a key route toward miniaturized optically pumped magnetometers capable of high-spatial-resolution imaging. However, conventional planar mic...
Zhao-Hui Wang, Zi-Hua Liang, Nan Li et al.· AI Photonics Technology Symp...· 0 citations
Spatial mode demultiplexing (SPADE) has recently emerged as a platform for quantum-limited measurement and control of nanomechanical resonators; however, taking full advantage of this approach requires reconfigurable coherent manipulation of multiple spatial modes. Here we introduce a reconfigurable SPADE architecture...
Neshat Sadafi, Morgan E. Choi, Daniel Allepuz-Requena et al.· Optical Trapping and Optical...· 0 citations
Metalenses offer a pathway toward flat, wafer-level optics, but their translation to mobile imaging has been hindered by the difficulty of achieving broadband performance at millimeter-scale apertures. Here we report a visible metalens that imparts a wavelength-invariant phase profile in a hybrid configuration with r...
H. Park, Hyeonsoo Park, Hae-Sung Kim et al.· Nano letters (Print)· 0 citations
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