Design and Analysis of a Three-Legged Tilt Stage Inspired by Origami Mechanism

Abstract

With the rapid evolution of precision engineering such as integrated circuit fabrication and micro-nano manipulation, ultra-precision tilting stages face increasingly rigorous requirements for large stroke, high positional accuracy, low inter-axis coupling, and high structural rigidity. Conventional platforms are hampered by constrained stroke, significant cross-axis coupling and noticeable parasitic motion, while existing origami-based stages suffer from inadequate rigidity, insufficient load-bearing capacity and suboptimal motion resolution. To mitigate these bottlenecks, this paper proposes a novel 3-PRS parallel tilting stage incorporating origami-compliant mechanisms. The platform adopts a piezoelectric actuation configuration integrated with a secondary bridge-type displacement amplification mechanism, origami-inspired oscillating rocker and elliptical beam decoupling module. Mechanical modeling is established to elucidate its mechanical behaviors and motion transmission mechanisms, and ANSYS-based finite element analysis validates the theoretical model. Prototype tests demonstrate excellent displacement amplification, ultra-low inter-axis coupling, large tilting angle, considerable Z-axis travel, as well as high natural frequency and superior angular resolution. This design synergizes compliant and origami advantages, breaking through traditional limitations and providing a promising high-performance alternative for precision engineering applications.