Zhenhua Wu

A Generalizable Framework for Building Executable Domain‐Specific Large Language Models Under Data Scarcity: Demonstration on Semiconductor Technology Computer‐Aided Design Simulation

Scientific and engineering verticals often suffer from data scarcity and strict executability requirements: models must generate not only fluent text but also syntactically valid, tool‐compilable scripts. We present a schema‐first alignment framework for building compact, executable domain‐specific LLMs in low‐resource...