Review
Open access
Sep 2026
AI-Assisted MOS Gas Sensors: Sensing Materials, MEMS Platforms, Dynamic Operation, and Intelligent Applications
Metal oxide semiconductor (MOS) gas sensors are widely used for low-cost chemical detection, but their practical performance is still limited by high operating temperature, insufficient selectivity, signal drift, and device-to-device variation. Recent advances in microelectromechanical systems (MEMS), dynamic sensing p...
Jin Li, Tong-Heng Cheng, Hao-Qi Li et al.
· AI Sensors · 0 citations