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Author

Ying-Hang Jiao

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Open access Oct 2026

A novel microscale multilayer PZT MEMS cantilever for resonant photoacoustic gas sensing

This paper reports a novel photoacoustic spectroscopy (PAS) gas sensor based on micro-electro-mechanical systems (MEMS) that achieves resonance matching between a multilayer PZT piezoelectric microcantilever and an H-type acoustic resonator. The device integrates the PZT thin film and exhibits a measured mechanical res...

Shan Lin, Yong-Kang Gong, A. Michael et al. · 0 citations

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