Low-parasitic-resistance and fabrication-tolerant silicon microring modulators operating beyond 100 GHz.
Silicon microring modulators (MRMs) are promising for compact, energy-efficient optical interconnects, yet their electro-optic bandwidth is constrained by the RC time constant, and their resonance wavelength is highly susceptible to fabrication variations. In this work, we present a carrier-depletion MRM that mitigates...