W. Bowman

3D nanoscale design of oxide morphology, anisotropy and chemical heterogeneity by glancing angle physical vapor deposition.

Nanoelectronic thin films are increasingly used in functional, electrochemical and nanoelectronic applications. Glancing angle deposition (GLAD) enables 3D control over bottom-up synthesis of highly tunable films with well-ordered yet complex nanostructures, such as inclined nanocolumn arrays with intercolumn nanoporos...