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Sponsored AI Networking Cookbook: Practical recipes for AI-assisted network automation and development AI Networking Cookbook: Practical recipes for AI-assisted network automation and development

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T. Koseki

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Conference Jul 2026

Analysis of Energy-Efficient Multi-Heater Thermal Control for Semiconductor Vertical Furnaces

Fast, precise, and energy-efficient temperature control is essential for semiconductor vertical furnaces. In conventional configurations, a heater installed outside the process tube, referred to as the Main Heater, is relatively far from the temperature sensors near the wafers, resulting in slow thermal response and hi...

Koma Nishioka, Christian Milleneuve Budiono, Wataru Ohnishi et al. · 0 citations

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