Electro-thermal simulation data for inter-tier heat coupling and service-time degradation in stacked BEOL IGZO transistors
This dataset supports a simulation study of how heat from an active transistor in one tier of a monolithic three-dimensional stack affects the reliability of a transistor in the tier below it. The device modelled is a back-end-of-line indium-gallium-zinc-oxide (IGZO) thin-film transistor with an 80 nm channel length, a...