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Author

S. Morozov

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Sep 2026

Laser-plasma source of soft x-ray and extreme ultraviolet radiation for high precision reflectometry.

The paper presents the results of developing a laser-plasma source (LPS) for soft x-ray and extreme ultraviolet radiation intended for high-accuracy laboratory reflectometry. The design of key components of the LPS is described in detail. Plasma excitation is achieved using focused laser pulses with the following param...

Ivan Devyataykin, Nikolay I. Chkhalo, S. Garakhin et al. · 0 citations

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