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S. Hesse

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Sep 2026

A large-travel hybrid metrology platform integrating laser focus sensor and atomic force microscopy

Abstract Modern micro- and nanoscale manufacturing requires traceable multi-scale metrology spanning macroscopic geometries and sub-micrometer features. Singlesensor systems are limited by trade-offs between resolution, speed, and measurement range. This work presents a hybrid platform integrating an optical microscope...

D. A. Brasil, M. Katzschmann, S. Hesse et al. · 0 citations

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