Engineering Doping Profiles in SiN Waveguide-Coupled Horizontal Silicon SPADs for Enhanced Single-Photon Detection and Low Dark Noise
Single-photon detection using superconducting nanowire detectors has become a benchmark technology for quantum photonic applications, offering exceptional performance across a wide spectral range. However, their operation at cryogenic temperatures (typically 1–4 K) substantially increases system cost and complexity, li...