Explainable artificial intelligence-based prediction of electrical characteristics in GAA MOSFETs
In this paper, explainable artificial intelligence (XAI) based prediction is used for gate all around (GAA) MOSFET to predict its electrical behaviour. The data set is produced using TCAD simulations by changing device parameters like channel length (L g ), Radius of silicon pillar (R), work function (Φ m ), doping con...
Rashmi Gupta, Neeraj Gupta, Satya Narayan Agarwal
· Scientific Reports · 0 citations