Facile Geometry Engineering of Deep Ultraviolet Micro‐Scale Light Emitting and Detecting Diodes for High‐Speed Free‐Space Optical Communication
Dual‐functional micro‐diodes are attractive for compact multifunctional sensing and free‐space optical communication, yet performance in ultrasmall geometries is limited by poor photon extraction and suboptimal optical coupling. Here, we report a trench‐aspect‐ratio reconfiguration strategy in the fabrication of tr...