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Review Oct 2026

Ultrafast Laser Micro/Nano Processing of GaN for Next‐Generation Microelectromechanical Systems (MEMS) Applications

Gallium nitride (GaN) has established itself as a wide‐bandgap semiconductor, driving advances in radio‐frequency devices, solid‐state lighting, and high‐power electronics. Its chemical stability, strong piezoelectric properties, and biocompatibility have turned GaN into a crucial candidate for next‐generation microe...

Rizwana Bibi, Yang Li, Muhammad Farhan et al. · 0 citations
Open access Oct 2026

Dynamic feature-size tuning in femtosecond-laser nanofabrication with phase-modulated radially polarized beams

Femtosecond laser processing provides a versatile route for high-precision material structuring, yet the dynamic modulation of nanoscale feature sizes remains constrained by the far-field diffraction limit and insufficient control over local energy deposition. To overcome these limitations, we report a nanofabrication...

Bo Chen, Xin Li, Yi-Bo Lu et al. · 0 citations
Open access Sep 2026

Universal synthesis of high-entropy alloy nanostructures with femtosecond lasers

High-entropy alloy nanostructures (HEA-NSs) hold promise in advanced catalysis and materials science, but lack a robust and universal synthetic strategy designed at an atomic level. Here, femtosecond lasers are used to prepare HEA-NSs, from single atoms to 100 nm nanoparticles, either free-standing or supported on a va...

Zi-Kang Su, Lan Jiang, Yi-Heng Dai et al. · 0 citations

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