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Sponsored Design Multi-Agent AI Systems Using MCP and A2A: Engineer your own Pyt Design Multi-Agent AI Systems Using MCP and A2A: Engineer your own Pyt

Author

I. Ruíz-García

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Open access Sep 2026

Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

Aluminum nitride (AlN) is a biocompatible piezoelectric material with energy harvesting properties. This study examines the effects of post‐deposition rapid thermal annealing (RTA) on AlN thin films used in microelectromechanical systems (MEMS) resonators. RTA is performed in a N 2 ‐purged chamber at temperatures...

Laura Mazón-Maldonado, Lucía Nieto Sierra, M. P. V. Castro et al. · 0 citations

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