Mechanistic Insights Into Oxidation-Regulated Material Removal of Soft-Brittle CdS in Chemical Mechanical Polishing
Cadmium sulfide (CdS) is a typical soft and brittle semiconductor widely used in infrared detection and optoelectronic devices. However, its low hardness and high brittleness make ultra-precision machining with low damage highly challenging. Chemical mechanical polishing (CMP) effectively yields atomically smooth sur...