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Gregory M. Johnson

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Oct 2026

Imaging Dopant Interfaces in 5 nm-Node finFETs with STEM EBIC

The transmission electron microscope (TEM) provides high-resolution image contrast related to the physical structure and composition of a sample. But, lacking sensitivity to local electronic properties, TEM is blind to device features in which very subtle physical changes give rise to substantial electronic changes,...

W. A. Hubbard, H. Stegmann, Hyunhwa Kim et al. · 0 citations

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