Geometrical distortion effect in Fizeau interferometry measurements of large-radius tangentially curved optics. Part 1: development, characterization, and first application of bendable URA BPRA test sample
Plane wavefront Fizeau interferometry (PWFI) is one of the major metrology techniques for surface characterization of xray optics in the low and middle spatial frequency range. However, PWFI measurements of curved optics are often associated with significant systematic effects arising from complex phenomena, including...