This review traces the development of semiconductor equipment, from bipolar junction transistors (BJTs) to advanced architectures such as fin field‐effect transistors (FinFETs), nanowire transistors, and carbon nanotube FETs. We highlight major developments that have enabled improvements in performance, energy efficien...
M. Subramanian, Mahalakshmi Balan, Ananthi Kaliyamoorthy et al.· Physica Status Solidi (a)· 0 citations
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